Method of manufacturing photovoltaic device

A method of manufacturing a photovoltaic device comprising the steps of:

• preparing a substrate having an insulating surface;
• forming on said insulating surface of said substrate a plurality of mutually spaced first electrodes corresponding to a plurality of photoelectric converting regions;
• forming a non-crystalline semiconductor film and a second electrode continuously covering the entire surface of said plurality of first electrodes one upon the other in this order;
• removing portions of said second electrode by means of an energy beam at least in the vicinities of the gap between adjacent said first electrodes so as to divide said second electrodes into a plurality of portions corresponding to said plurality of photoelectric converting regions;
• removing said semiconductor film by dry etching, using said second electrodes as masks, thereby exposing a portion of each of said first electrodes;
• and
• electrically connecting said plurality of photoelectric converting regions by forming a connecting electrode electrically connected to each said adjacent second electrode and the exposed portion of each said first electrode.