Attraction holding device
AssigneeFuji Photo Optical Co., Ltd.
InventorsShigeru Itamoto, Kenji Yasuda, Senji Mikami
Life of this patent
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Abstract
A device for holding a measurement object e.g. in interferometers comprises a base plate and an attraction plate mounted on the base plate so as to attract the object placed on an upper surface of the attraction plate to the base plate together with the attraction plate by a vacuum applied via attraction grooves formed on the base plate and attraction passages perforated through the attraction plate. The upper surface of the base plate is formed as a reflection plane, and the attraction plate is made of a transparent material, so that Newton's rings generated by light reflected from the upper surface of the base plate and light reflected from the lower surface of the attraction plate can be observed from above the attraction plate.
Claims6
An attraction holding device comprising a base plate and an attraction plate mounted on said base plate with a lower surface of said attraction plate contacting an upper surface of said base plate so as to attract an object placed on an upper surface of said attraction plate to said base plate together with said attraction plate by sucking via attraction grooves formed on said base plate and attraction passages perforated through said attraction plate from the lower surface to the upper surface thereof, wherein the improvement comprises forming said upper surface of said base plate as a reflection plane, and constituting said attraction plate by use of a transparent material.
Dependencies are inferred from the claim text.