Ultrasonic microscope system
OwnerNoriyoshi Chubachi, Junichi Kushibikiinventors
Life of this patent
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Abstract
An ultrasonic transmitter-receiver for radiating a focused ultrasonic beam and a sample are moved relative to each other in the axial direction of the ultrasonic beam. A reflected wave from the sample is received and a curve V(Z) of variations in the level of the reflected wave with respect to the relative movement is obtained. A reference level of interference of a directly reflected wave and a leaky elastic wave is subtracted from V(Z) to perform waveform processing. The waveform processing output is subjected to a waveform analysis, and from the analysis results, the velocity and/or the attenuation of the leaky elastic wave are calculated.
Claims31
An ultrasonic microscope apparatus comprising:
- a high-frequency pulse generator for generating high-frequency pulses obtained by pulse-modulating a carrier of an ultrasonic frequency;
- a duplexer connected to the high-frequency pulse generator, for separating a transmission signal and a reception signal;
- an ultrasonic transmitter-receiver connected to the duplexer and supplied with the high-frequency pulse, for radiating an ultrasonic wave of the ultrasonic frequency as a focused ultrasonic beam and receiving a reflected wave;
- a sample holder for holding a sample for exposure to irradiation by the focused ultrasonic beam from the ultrasonic transmitter-receiver via an acoustic field medium;
- Z-axis direction moving means for moving the sample holder and the ultrasonic transmitter-receiver relative to each other along the axis of the ultrasonic beam;
- a detector circuit connected to the duplexer, for receiving an electric signal of the reflected wave from the sample received by the ultrasonic transmitter-receiver and amplifying and rectifying the electric signal to provide an electric reflection signal of a level corresponding to the level of the reflected wave;
- and
- waveform analyzing means connected to the detecting circuit, for inputting the output reflection signal therefrom upon each occurrence of the relative movement for a fixed distance and analyzing an envelope waveform of a series of input reflection signals by a spectral analysis to obtain the dip interval of interference of a leaky elastic wave and a directly reflected wave from the sample.
Dependencies are inferred from the claim text.