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US 4,539,822 AGranted
Vibration isolator for cryopump
AssigneeNational Electrostatics Corp.
InventorMark L. Sundquist
Life of this patent
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Abstract
A vibration isolator is disclosed to mount a cryopump expander module or other vibrating equipment on a vacuum housing. The isolator includes a welded metal bellows which both forms a vacuum-tight passage and acts as an isolating spring, and a plurality of elastomeric isolators which clamp the oscillations of the bellows.
Claims6
A vibration isolator for mounting a cryopump expander module on a vacuum chamber comprising
- a pair of spaced parallel flanges sized and shaped so as to be easily mated with vacuum-tight connection to the cryopump expander module and the vacuum chamber, each flange having a circular port formed extending through it;
- a generally cylindrical bellows assembly extending between the flanges, the open ends of the bellows assembly surrounding the ports in the respective flanges to form a vacuum-tight passage through the isolator, the bellows assembly functioning as a spring isolator and coupling between the flanges;
- and
- a plurality of high damped resilient isolators mounted between the flanges in parallel with the bellows assembly, the isolators being both semi-rigid and resilient so as both to hold the flanges apart and to damp the oscillations of the bellow assembly, the spring and damping characteristics of the bellows assembly and isolators being selected so that the resonant frequency of the combination is lower than the high frequency vibrations from the expander module.
1 more element
Dependencies are inferred from the claim text.