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US 4,539,062 AGranted
Modular plasma reactor with local atmosphere
AssigneeTegal Corporation
InventorJohn P. Zajac
Life of this patent
Estimating the term…
Abstract
A plasma reactor system is described in which a plurality of components are segregated into modules. Devices known as mass flow controllers for gas supply lines are located one each per module. A plenum for inert gas is connected to each module to bath the module in an inert atmosphere.
Claims4
In equipment for processing semiconductor wafers with a plasma, said equipment including as components a reactor chamber, one or more gas supply lines associated with said chamber, an electronic control unit, and a plurality of transducers coupled to said control unit, the improvement comprising:
- a plurality of modules for containing at least some of said components;
- a plenum for containing an inert atmosphere;
- and
- said modules being coupled to said plenum so that said atmosphere flows through and around said module.
1 more element
Dependencies are inferred from the claim text.