Channel stop isolation technology utilizing two-step etching and selective oxidation with sidewall masking

Abstract

A sidewall-nitride isolation technology avoids stress-induced defects, while permitting a heavy channel stop implant to avoid turn-on of the field oxide transistor, by performing a two-step silicon etch. The first channel stop implant is performed after the first silicon etch, before the sidewall nitride is deposited. A further silicon etch is performed after the sidewall nitride is in place, and a second channel stop implant follows. The first implant can be a light dose, to avoid excess subthreshold leakage in the active devices due to field-assisted turn on at the corners of the moat regions, and the second implant can be a very heavy dose to provide complete isolation without any danger of the channel stop species encroaching on the active device regions.

Dependencies are inferred from the claim text.