Stroboscopic scanning electron microscope
AssigneeTokyo Shibaura Denki Kabushiki Kaisha
InventorsMotosuke Miyoshi, Tetsuya Sano
Life of this patent
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Abstract
A synchronizing signal from a tester which also supplies a test signal to an object to be measured is supplied to a programmable counter. An output from the programmable counter is supplied to a D/A converter which then produces an X-axis scanning control signal S.sub.X. The output from the programmable counter is frequency-divided by a frequency divider. A frequency-divided signal is then supplied to a D/A converter which produces a Y-axis scanning control signal S.sub.Y. An image memory is arranged to store data of the number of secondary electrons and to supply this data to a CRT display unit. A cursor is moved to specify a measuring position under the control of a controller.
Claims6
A stroboscopic scanning electron microscope which comprises:
- a scanning electron microscope having a beam pulse generator for emitting a pulsed electron beam onto an object to be measured;
- test signal supplying means for supplying a test signal to the object;
- beam pulse generating means for controlling said beam pulse generator in response to a synchronizing signal from said test signal supplying means;
- scanning controlling means for controlling scanning by the electron beam from said beam pulse generator;
- detecting means for detecting the number of secondary electrons generated from the object upon focusing of the electron beam thereon;
- memory means for storing data of the number of secondary electrons detected by said detecting means for use in developing potential contrast images;
- displaying means for displaying said potential contrast images from said data stored in said memory means;
- display controlling means for controlling said display means;
- and
- address generating means for reading a desired address of said memory means which is accessed by said displaying means and for generating an address signal to said memory means.
Dependencies are inferred from the claim text.