Photoresist compositions and method
AssigneeGeneral Electric Company
InventorJames V. Crivello
Life of this patent
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Abstract
Water soluble blends are provided of alkanolacrylamide, water soluble hydroxyl containing film forming organic oligomer and an effective amount of an onium salt photoinitiator. These photocurable compositions can be used as photoresists.
Claims8
A water soluble photocurable photoresist composition which is based on a simultaneous cationic and free radical cure between alkanol acrylamide and a water soluble hydroxyl functional film forming organic oligomer comprising a blend of by weight,
- (A) 50 to 98% of a solvent and
- (B) 2 to 50% of a photoresist composition comprising
- (i) 100 parts of water soluble hydroxyl functional film forming organic oligomer,
- (ii) 50 to 100 parts of an alkanolacrylamide,
- (iii) an effective amount of an onium salt which is sufficient to effect the cure of the photocurable photoresist compositions selected from the class consisting of
- [Ar.sub.2 I].sup.+ [MF].sub.d.sup.- and
- [Ar.sub.3 S].sup.+ [MF].sub.d.sup.-
- where Ar is selected from C.sub.6-13) aromatic monovalent hydrocarbon radical and substituted aromatic monovalent hydrocarbon radical, M is a metalloid selected from phosphorous, arsenic and antimony and d is an integer equal to 4-6 inclusive.
A water soluble photocurable photoresist composition which is based on a simultaneous cationic and free radical cure between alkanol acrylamide and a water soluble hydroxyl functional film forming organic oligomer comprising a blend of by weight,
- (A) 50 to 98% of a solvent and
- (B) 2 to 50% of a photoresist composition comprising
- (i) 100 parts of water soluble hydroxyl functional film forming organic oligomer,
- (ii) 50 to 100 parts of an alkanolacrylamide, and
- (iii) an effective amount of an onium salt having the formula ##STR4## which is sufficient to effect the cure of the photocurable photoresist composition.
A water soluble photorcurable photoresist composition which is based on a simultaneous cationic and free radical cure between alkanol acrylamide and a water soluble hydroxyl functional film forming organic oligomer comprising a blend of by weight,
- (A) 50 to 98% of a solvent and
- (B) 2 to 50% of a photoresist composition comprising
- (i) 100 parts of water soluble hydroxyl functional film forming organic oligomer,
- (ii) 50 to 100 parts of an alkanolacrylamide, and
- (iii) an effective amount of an onium salt having the formula ##STR5## which is sufficient to effect the cure of the photocurable photoresist composition.
Dependencies are inferred from the claim text.