Back to results
US 4,537,680 AGranted
Integral fluid filter and capillary
AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorPhillip W. Barth
Life of this patent
Estimating the term…
Abstract
A comb filter including a first plurality of generally parallel grooves and a capillary including a second groove connected to the first plurality of grooves are integrally formed in a substrate such as by selective etching a surface of a semiconductor substrate. A cover is affixed to the surface and covers the etched grooves. An input line is connected to the filter and an output line is connected to the capillary. A second comb filter can be included in the output line.
Claims6
An integral filter and capillary comprising
- a substrate having a major surface,
- a first recessed region on said surface and in said substrate including a first plurality of generally parallel grooves,
- a second groove on said surface and in said substrate connected with said first recessed region adjacent to one end of said first plurality of grooves, said second groove having cross-sectional dimensions greater than the cross-sectional dimensions of said first plurality of grooves,
- a cover affixed to said major surface and covering said first recessed region and said second groove,
- a fluid input to said first recessed region adjacent to one end of said first plurality of grooves opposite from said second groove, and
- a fluid output connected to said second groove.
3 more elements
Dependencies are inferred from the claim text.