Hermetic sealing of gallium arsenide components
AssigneeASEA Aktiebolag
InventorsChantal Dubon, Bertil Hok, Christer Ovren
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Abstract
An hermetic seal at a smooth interface between a gallium arsenide body and a glass body is effected without organic or inorganic binders by thermally bonding the bodies at the interface while ensuring that the oxygen concentration at the interface is so low that there is no optically detectable variations in color of the gallium arsenide close to the interface.
Claims22
A gallium arsenide opto-component comprising an interface between a body of gallium arsenide and a body of glass, said interface being free of surface irregularities larger than 0.1 .mu.m and smaller than 100 .mu.m and said gallium arsenide body and said glass body being hermetically sealed together at said interface,
- said interface being free from any bonding medium and having no optically detectable tints, and
- said glass body having a concentration of oxygen which, at least in a 10 .mu.m layer adjacent to the interface, is considerably lower than the stoichiometric concentration needed for the formation of oxides selected from the group consisting of gallium oxides and arsenic oxides.
A gallium arsenide opto-component comprising a glass light-transmitting member terminating in a first surface and a second surface of a body of gallium arsenide hermetically sealed to said first surface to form said opto-component, said two surfaces being smooth, having no surface irregularities greater than 0.1 .mu.m, and clean, having no detectable tint, and said first surface marking the end of a layer in said glass member which is at least 10 .mu.m thick and which contains a concentration of oxygen which is considerably lower than the stoichiometric concentration needed for forming oxides selected from the group consisting of gallium oxides and arsenic oxides.
A method of effecting a hermetic bond between smooth, similarly shaped clean surfaces of a glassy body and a body of gallium arsenide which method comprises thermally bonding said surfaces together under conditions in which the oxygen concentration in the glass body, at least in a 10 .mu.m layer adjacent to said surface thereof, is less than the stoichiometric concentration required for the formation of oxides selected from the group consisting of gallium oxides and arsenic oxides.
Dependencies are inferred from the claim text.