Method of making a loss stabilized buried heterostructure laser
AssigneeAT&T Bell Laboratories
InventorsCharles H. Henry, Ralph A. Logan
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Abstract
A buried heterostructure laser which obtains lowest mode operation by larger differences in loss between the lowest and higher order modes is described. The loss is achieved by interface scattering between the mesa and the burying layer. The scattering losses increases with refractive index discontinuity, interface roughness and decreasing mesa width. Stabilization results because scattering losses increase rapidly with the order of the transverse modes.
Claims6
A method of fabricating at least one buried double heterostructure laser comprising the steps of sequentially growing first, second and third semiconductor layers on a semiconductor substrate, said second layer having a bandgap less than the bandgaps of said first and said third layers, said second layer being an active layer, etching a mesa having width fluctuations by removing portions of said first, second and third semiconductor layers thereby exposing said substrate and growing a fourth semiconductor layer, said fourth layer contacting opposite side faces of said first, second and third semiconductor layers.
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