Back to results
US 4,536,414 AGranted
Superconductive tunnel junction device with enhanced characteristics and method of manufacture
AssigneeSperry Corporation
InventorsHarry Kroger, Don W. Jillie, Lawrence N. Smith
Life of this patent
Estimating the term…
Abstract
A superconductive tunnel junction device comprises first and second superconductive electrodes with a barrier disposed therebetween where the first superconductive electrode and the barrier are formed without interruption in the same vacuum system pump down and with the first superconductive electrode subjected to sputter etching in an argon plasma before the deposition of the barrier for improving the characteristics of the device.
Claims4
A method of manufacturing a superconductive tunnel junction device in a vacuum chamber comprising the steps of
- pumping the vacuum system down to vacuum,
- depositing a first layer of superconductive material on a substrate,
- bombarding said first layer of superconductive material with inert gas ions, providing a bombarded first superconductive layer,
- forming a barrier layer on said bombarded first superconductive layer,
- said bombarding step being performed prior to forming said barrier layer,
- said aforementioned steps being performed without breaking the vacuum system, and
- completing said superconductive tunnel junction device.
4 more elements
Dependencies are inferred from the claim text.