Method of making liquid jet recording head

A method of making a liquid jet recording head with a liquid discharge section, including orifice means for discharging liquid to form flying droplets thereof and liquid passage means communicating with said orifice means and having a thermally acting portion for causing thermal energy to act on the liquid to form said liquid droplets, said thermally acting portion including a heat generating resistive portion on a substrate between at least one pair of opposed electrodes electrically connected with said heat generating resistive portion, said method comprising the steps of:

• performing a first etching process including providing a first photoresist pattern having a predetermined width to cover a portion of a layer on said substrate and forming at least one of said electrodes and said heat generating portion by etching the exposed portion of said layer;
• and
• performing a second etching process including providing a second photoresist pattern having a width greater than the width of said first photoresist pattern to enable removal of remnants of said exposed portion of said layer not removed in said first etching process.