Optimum surface contour for conductive heat transfer with a thin flexible workpiece
AssigneeVarian Associates, Inc.
InventorScott C. Holden
Life of this patent
Estimating the term…
Abstract
Conductive heat transfer between a thin deformable workpiece and heat sink is optimized by imposing a load over the workpiece resulting in a uniform contact pressure distribution in said workpiece which is also the maximum stress consistent with the elastic properties of the workpiece. The surface of the heat sink is given a contour determined by these criteria for a thin circular disk clamped thereto.
Claims10
Apparatus for removal of heat from a planar article under irradiation by a radiation source, said apparatus comprising:
- heat sink means for removal of heat transferred thereto from said article, said heat sink means including a nonplanar, nonspherical convex contact surface;
- and
- clamping means for securing a peripheral portion of said planar article to said contact surface such that said article conforms to said contact surface, said contact surface having a contour which cooperates with said clamping means to impose uniformity of contact pressure over the surface area of said article in contact with said contact surface and to stress said article to approach the limiting elastic stress thereof.
Apparatus for transfer of thermal energy with a thin, flexible workpiece in vacuum comprising:
- a thermally conductive member for transfer of thermal energy to or from said workpiece, said member including a nonplanar, nonspherical contact surface;
- and
- clamping means for securing a peripheral portion of said workpiece to said contact surface such that said workpiece conforms to said contact surface, said contact surface having a contour which is selected to cooperate with said clamping means to impose uniformity of contact pressure over the surface area of said workpiece in contact with said contact surface and to stress said workpiece to approach the limiting elastic stress thereof, the selection of said contour being based on the geometry and material of said workpiece and the forces imposed upon said workpiece by said clamping means.
Dependencies are inferred from the claim text.