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AssigneeVEB Hochvakuum Dresden
InventorsWolfgang Schiess, Herbert Thorandt
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A method and an apparatus which, when interposed or integrated into sensitive pressure analyzers of pressure and vacuum measuring engineering equipment, prevent the intrusion of corrosive or condensable gases, or vapors, into the inside of the analyzer, and hold back soiling (dust and dirt) particles contained in gaseous measuring media. The present development contemplates a low-frequency oscillating diaphragm body, disposed inside of a pressure, or vacuum sealed, duct housing, in such a way, that although it optically diametrically blocks the light tube connection, it allows static pressure compensation via one or several bypass boreholes; it forces, by its energy of motion, directly impinging soiling dust and dirt particles, and gas or vapor molecules, to change their original direction of motion. The present protection arrangement is utilizable not only in pressure ranges above atmospheric pressure, but also in vacuum up to an absolute pressure of <10 Pa. It can be utilized as a separate component, but it can also be integrated into analyzers, especially into modulation analyzers. The protection method and apparatus safeguards the continued and linear measurement of gas pressure over a great measuring range.
A method for the protection of a sensitive device by prevention of the intrusion of a deleterious component into the inside of said sensitive device via transfer or measurement connection member, which comprises interposing into said connection member a low-frequency oscillatable diaphragm element, oscillating said diaphragm element in periodic low operating frequency between about 50 and 400 Hz at about 10 to 15 V, so that said diaphragm element comprises an alternating pressure transmitter system which produces an alternating pressure in the environment of said connection member, the resulting sound level in the environment of said connection member being at least 100 dB at atmospheric pressure;
An apparatus for the protection of a sensitive device by prevention of the intrusion of a deleterious component into the inside of said sensitive device which comprises a sensitive device, a gas-containing transfer or measurement connection member, said connection member extending to the inside of said sensitive device and containing a low frequency oscillatable diaphragm element, said diaphragm element comprising an alternating pressure transmitter system, means to oscillate said diaphragm element in periodic low operating frequency, so that said diaphragm element produces an alternating pressure in the environment of said connection member by periodic movement, so as to transmit kinetic energy to the gaseous phase in said connection member, whereby kinetic energy is transmitted to any deleterious component in said gaseous phase, thereby forcing said deleterious component in an opposite direction relative to said sensitive device, so that the intrustion of said deleterious component into said sensitive device is prevented.
Dependencies are inferred from the claim text.