Method and apparatus for controlling article temperature during treatment in vacuum

A method of controlling the temperature of an article, the shape of which may vary, while exposing a selected portion of it to treatment by an energetic ion beam in vacuum of pressure of the order of 10.sup.-5 torr,

• said method comprising
• providing, within a container, a heat conductive substance of selected depth having a solid rigid state under conditions of said treatment and having a molten state at a higher temperature below the minimum damage temperature of said article,
• said substance being chemically nonreactive, nonwetting and nonadhesive at said higher temperature with a first portion of said article,
• heating said heat conductive substance to said higher temperature to cause said substance to be in molten state,
• temporarily holding said article in selected position to submerge said first portion of said article substantially below the surface of said molten heat conductive substance while a second portion of said article to be treated protrudes above said surface,
• cooling said heat conductive substance to cause it to solidify about said immersed first portion of said article in intimate heat conducting and rigid supporting relationship therewith, with said second portion of said article protruding above said surface, in position for exposure to said beam,
• disposing said rigidily held article in the path of said energetic beam, with the surface of said rigid heat conductive substance lying at an angle to the axis of said beam,
• subjecting said exposed second portion of said article to said energetic ion beam for said treatment while rotating said rigidly held article about an axis of rotation disposed at an angle to said beam and controlling the temperature of said article by heat transfer via said intimately engaged, rigid supporting heat conductive substance, and, thereafter, following said treatment,
• reheating said rigid substance to said higher temperature to cause said substance to be in molten state, and
• removing the treated article therefrom.

A method of controlling the temperature of an article comprised of predetermined material during treatment in vacuum of said article with an energetic beam,

• said method comprising
• providing a heat conductive substance having a solid, rigid state under conditions of said treatment, and having a molten state at a higher temperature below the minimum damage temperature of said article, and being chemically nonreactive, nonwetting and nonadhesive at said higher temperature with a first portion of said article,
• heating said heat conductive substance to said higher temperature to cause said substance to be in molten state,
• immersing said first portion of said article into said molten heat conductive substance, a second portion of said article to be treated remaining unimmersed, exposed for said treatment, by applying a magnetic field through said heat conductive substance to draw said first portion of said article through said heat conductive substance in molten state into fixed position,
• cooling said heat conductive substance to cause it to solidify about said immersed first portion of said article to hold said article for said treatment,
• subjecting said exposed second portion of said article to an energetic beam for said treatment in vacuum,
• controlling the temperature of said temperature control surface and thereby, via said heat conductive substance, controlling the temperature of said article during said treatment, and, thereafter, following said treatment,
• reheating said heat conductive substance to said higher temperature to cause said substance to be in molten state, and
• removing the treated article from said molten heat conductive substance.

An apparatus for controlling the temperature of an article, the shape of which may vary, while a portion of said article is exposed to a predetermined treatment by an ion energetic beam,

• said apparatus comprising:
• a container, and
• within said container, a heat conductive substance of selected depth having a solid, rigid state under the conditions of said treatment and having a molten state at the temperature below the minimum damage temperature of said article,
• said substance being chemically nonreactive, nonwetting and nonadhesive at said higher temperature with a first, support portion of said article,
• said contained substance being adapted, in molten state to submersibly receive said first support portion of said article substantially below the surface of said molten heat conductive substance while leaving a second portion of said article to be treated exposed above said surface in selected position,
• said substance being further adapted, upon cooling, to solidify about said immersed first, support portion of said article in intimate heat conducting and rigid supporting relationship therewith, with said second portion of said article protruding above said surface, in selected position for exposure to said beam,
• whereby, said rigid heat conductive substance permits control of the temperature and accurate angular positioning of said article during treatment with said energetic ion beam in vacuum.