# US 4,510,222 A · Photomask with corrected white defects

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- Number: US 4,510,222 A
- Document ID: US4510222A
- Status: Granted
- Kind: A
- Application number: 06/496,245
- Filed: 1983-05-19
- Granted: 1985-04-09
- Earliest claimed: 1982-05-24
- Assignees: Hitachi, Ltd.
- Inventors: Masaaki Okunaka; Katsuro Mizukoshi; Mikio Hongo; Tateoki Miyauchi
- Web page: https://patentgrep.com/patent/US4510222A

## CPC

- G03F 1/72: Repair or correction of mask defects
- G03F 1/54: Absorbers, e.g. of opaque materials
- Y10S 430/139: Defect coating
- Y10S 430/146: Laser beam
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A photomask with white defects that have corrected with a film comprising a mixture of silver and tantalum oxide. The film has a good resistance to chemicals.

## Claims

### Claim 1

A photomask with corrected white defects which comprises the white defects having been coated with a film comprising a mixture of silver and tantalum oxide to form a light-shielding film for the white defects which is sufficiently resistant to chemicals such that the photomask can be washed without dissolution of said film and which exhibits good adhesion to the photomask substrate.

### Claim 2 (depends on 1)

A photomask with corrected white defects according to claim 1 wherein the film comprising a mixture of silver and tantalum oxide is obtained by applying a composition composed of
(a) silver nitrate,
(b) at least one compound selected from the group of tantalum complexes described by general formulas (1) to (3)
Ta(OR.sub.1).sub.l (R.sub.2 COCR.sub.3 COR.sub.4).sub.5-l ( 1)
Ta(OR.sub.1).sub.m (OCOR.sub.5).sub.5-m ( 2)
Ta(OR.sub.1).sub.n (R.sub.2 COCR.sub.3 COR.sub.4).sub.k (OCOR.sub.5).sub.5-n-k ( 3)
where R.sub.1, R.sub.3, and R.sub.5 are alkyl groups of 1 to 18 carbon atoms, R.sub.2 and R.sub.4 are alkyl or alkoxy groups of 1 to 18 carbon atoms, and l, m, n, and k are 0 or integers from 1 to 5, with n+k.ltoreq.5, and
(c) a solvent,
said components (a) and (b) being combined in a mixing ratio by mole falling with the range described in Eq. (I) below ##EQU3## to at least the white defects of a photomask pattern, and irradiating the defects with a beam of light, thereby bringing about deposition of the silver and tantalum oxide.

### Claim 3 (depends on 2)

A photomask with corrected white defects according to claim 2 wherein a multibasic carboxylic acid is also added to the composition.

### Claim 4 (depends on 2, 3)

A photomask with corrected white defects according to claim 2 or 3 wherein the solvent is a mixture of the nitrile substitution product of an aliphatic hydrocarbon and either an alcohol or the monoalkyl ether of an ethylene glycol.

### Claim 5 (depends on 3)

A photomask with corrected white defects according to claim 3 wherein the carboxylic acid is at least one compound selected from the group consisting of malonic acid, methylmalonic acid, succinic acid, methylsuccinic acid, glutaric acid, adipic acid, suberic acid, azelaic acid, sebacic acid, itaconic acid, maleic acid, citraconic acid, ethylmaleic acid, and mesaconic acid.

### Claim 6 (depends on 2)

A photomask with corrected white defects according to claim 2 wherein said beam of light is a laser beam.

### Claim 7 (depends on 2)

A photomask with corrected white defects according to claim 2 wherein said composition is applied to at least the white defects by spin coating the composition on the photomask to provide a uniform film.

### Claim 8 (depends on 3)

A photomask with corrected white defects according to claim 3 wherein said silver nitrate and said multibasic carboxylic acid are used in a mixing ratio, in moles, of: ##EQU4##

### Claim 9 (depends on 4)

A photomask with corrected white defects according to claim 4 wherein said alcohol is selected from the group consisting of methanol, ethanol and isopropanol; the monoalkyl ether of ethylene glycol is selected from the group consisting of ethylene glycol monomethyl ether and ethylene glycol monoethyl ether; and said nitrile substitution product of an aliphatic hydrocarbon is selected from the group consisting of acetonitrile and propionitrile.