Laser beam plasma pinch X-ray system

A method for producing X-rays comprising:

• repeatably generating plasma in an annulus directly from solid material by laser beam impingements;
• and
• generating X-rays by passing high current through said plasma causing magnetic field plasma pinching.

A method for producing X-rays usable for fine line lithography, comprising:

• repeatably generating plasma in an annulus directly from solid material by laser beam impingement;
• and
• generating X-rays by passing high current axially through said plasma causing radial inward magnetic field pinching of said plasma annulus.

Apparatus for producing X-rays comprising:

• means for generating plasma directly from solid material by laser beam impingement along a plurality of axially extending laser beam paths impinging said solid material at a plurality of radially spaced locations;
• and
• means for generating X-rays by passing high current through said plasma between axially spaced electrodes causing radially inward magnetic field plasma pinching, the X-ray emitting plasma pinched region being at a different location than and spaced radially inwardly of the laser beam impingment location.

Apparatus for producing X-rays comprising:

• means for repeatably generating plasma in an annulus directly from solid material by laser beam impingement;
• and
• means for generating X-rays by passing high current through said plasma causing magnetic field plasma pinching.

A method for producing X-rays comprising:

• initially generating plasma directly from solid material by axial laser beam impingment at radially spaced locations;
• and
• subsequently generating X-rays by passing high current axially through said plasma causing radially inward magnetic field plasma pinching, said laser beam impingement occuring prior to said plasma pinching.

Apparatus for producing X-rays comprising:

• means for initially generating plasma directly from solid material by axial laser beam impingement at radially spaced locations;
• and
• means for subsequently generating X-rays by passing high current axially through said plasma causing radially inward magnetic field plasma pinching, said laser beam impingement occuring prior to said plasma pinching.