Laser drilling system utilizing photoacoustic feedback
AssigneeInternational Business Machines Corporation
InventorsRobert L. Melcher, Sheree H. Wen
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AssigneeInternational Business Machines Corporation
InventorsRobert L. Melcher, Sheree H. Wen
Estimating the term…
A laser drilling control system utilizing photoacoustic feedback is described. The control system provides an accurate monitoring of the laser drilling of a multilayered printed circuit board thereby allowing uniform drilling through layers of different optical and photoacoustic properties by both analyzing the photoacoustic feedback signals received, and adjusting optimally the laser parameters such as pulse duration, wavelength, energy, pulse repetition rate, and the number of pulses, for each successive layer. The system also provides an end point detection which prevents underdrilling overheating, and overdrilling of underlying layers and associated damages. According to another aspect of this invention, the control system can be used as a sensitive misregistration detector for aligning the laser beam to a selected drill site for subsequent drilling at the selected drill site.
A misregistration detector for aligning a controllable radiant energy source to a selected drill site which is made of a first material, and said drill site being surrounded by a second material, comprising:
A system for drilling a workpiece having at least a substrate and a first layer on the surface of said substrate, comprising
Dependencies are inferred from the claim text.