Stacked semiconductor device with sloping sides
AssigneeTokyo Shibaura Denki Kabushiki Kaisha
InventorTadashi Shibata
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Abstract
Provided is a stacked semiconductor device wherein a plurality of semiconductor layers integrated with semiconductor elements are stacked with an insulating layer interposed between two adjacent of said semiconductor layers. This semiconductor device has one or more inclined faces extending over two or more of said semiconductor layers. These inclined faces are formed thereon with an interconnection layer or semiconductor element for effecting the transmission and reception of signals between circuits, having said semiconductor elements, formed in the different semiconductor layers, through another insulating layer.
Claims3
A stacked semiconductor device comprising:
- a plurality of semiconductor layers each having integrated circuits stacked with an insulating layer interposed between two adjacent of said semiconductor layers, and
- which has at least one inclined face defined by the sloping sides of two or more of said semiconductor layers and one or more of said insulating layers interposed therebetween,
- said inclined face being formed thereon through another insulating layer, with at least one element for effecting the transmission and reception of signals between said integrated circuits formed in the different semiconductor layers,
- said element being one member selected from the group consisting of an interconnection layer, a semiconductor element and a controller for the respective integrated circuits of said semiconductor layers.
Dependencies are inferred from the claim text.