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AssigneesAgency of Industrial Science and Technology, Ministry of International Trade & Industry
InventorMutsuo Ogura
Estimating the term…
A scanning-type lithographic and image-pickup device causes the terminal face of either a projecting optical fiber or a picking-up optical fiber to scan a given object in the plane of real image of an objective lens, projects a light through the projecting optical fiber onto the object, and receives the reflected light or a light of photoluminescence through the picking-up optical fiber. When this device is applied to a spectromicroscope, the quantitative surface information can be spectrally measured with high resolution and high reproducibility. When the device is applied to a contracting-projection exposure device or a selective laser annealing device, positional alignment and exposure pattern correction can be easily effected with high accuracy and high productivity. Simultaneous fabrication of a plurality of electronic components can be also obtained by use of this device.
A scanning-type lithographic and image-pickup device, comprising at least one projecting optical fiber, at least one picking-up optical fiber, a scanning mechanism for causing the terminal portions of said projecting and picking-up optical fibers to produce a scanning motion, and an optical system for guiding the light projected from said projecting optical fiber to the surface of a given object and then guiding the light reflected on said surface through the same light path into said picking-up optical fiber, either of said projecting optical fiber and picking-up optical fiber being positioned in the plane of real image of said optical system and the other optical fiber being positioned in front of or behind the plane of real image.
Dependencies are inferred from the claim text.