Precision parallel translation system
AssigneeHitachi, Ltd.
InventorsMotoya Taniguchi, Minoru Ikeda, Yoshihiro Komeyama
Life of this patent
Estimating the term…
Loading patent…
AssigneeHitachi, Ltd.
InventorsMotoya Taniguchi, Minoru Ikeda, Yoshihiro Komeyama
Estimating the term…
A precision parallel translation system including a pair of tables or upper and lower tables movable parallel to and in directions perpendicular to each other, and a pair of drive means for rough movement each detachably connected to one of the tables to drive the respective table for movement a relatively long distance. Each table supports drive means for fine movement detachably connected to a base (which is the lower table in the case of the upper table) supporting the respective table. The table is moved a relatively long distance by the drive means for rough movement when rough movement is effected, to effect rough positioning of the table. Then the drive means for fine movement is secured to the base while detaching the drive means for rough movement from the table, to drive the table for fine movement to effect precision positioning of the table.
A precision parallel translation system comprising:
A precision parallel translation system comprising:
Dependencies are inferred from the claim text.