Thermal conductivity vacuum gage
AssigneeLeybold-Heraeus GmbH
InventorGunther Reich
Life of this patent
Estimating the term…
Abstract
A thermal conductivity vacuum gage has a vacuum-sensing probe and a separate operating unit for indicating the vacuum sensed by the probe and supplying electrical power for the vacuum sensing by the probe. An electrically-conducting cable connects the probe to the operating unit to form measuring and power supply circuits therebetween. The portion of the measuring circuit and the portion of the power supply circuit in the operating unit are identical or common, i.e. the same circuit portion, so that variations in the operation of this common circuit portion affect circuits the same in contrast to prior gages having separate measuring and power supply circuits, whereby variations in the operation of one could affect the other.
Claims5
A thermal conductivity gage for measuring the vacuum (pressure) of a gas, comprising:
- at least one probe means in a probe unit including at least a temperature-dependent resistance element in thermal communication for said measuring, whereby the vacuum (pressure) of said gas affects the temperature-dependent resistance of said temperature-dependent resistance element;
- an operating unit including a power supply and an indicator;
- electrical conductor means for electrically connecting said probe means and said operating unit;
- a measuring circuit electrically connected to said operating unit, said measuring circuit connected by said conductor means to responsive means for response to the temperature-dependent resistance of said temperature-dependent resistance element and said indicator, a measuring electric current flowing within said measuring circuit which is changed by said responsive means, whereby to allow said indicator to reflect said vacuum affect on said temperature-dependent resistance of said temperature-dependent resistance element and thereby indicate the vacuum;
- and
- a power supply circuit to supply electrical current to said temperature-dependent resistance element and said measuring electric current,
- said measuring circuit having a portion in said probe means and a portion in said operating unit, and
- said power supply circuit having a portion in said probe means and a portion in said operating unit,
- said portion of said measuring circuit in said operating unit being identical with (the same as) said portion of said power supply circuit in said operating unit.
Dependencies are inferred from the claim text.