Combination film, in particular for thin film electroluminescent structures
AssigneeOy Lohja AB
InventorJarmo I. Skarp
Life of this patent
Estimating the term…
Abstract
Described herein is a combination film based on aluminium oxide (Al.sub.2 O.sub.3) and titanium oxide (TiO.sub.2), to be used in particular in the thin film electroluminescent structures. Aluminum oxide is an amorphous insulator having a low refraction index, whereas titanium oxide is a chrystalline conductor having a high refraction index. The combination film according to the invention comprises a plurality of alternating aluminium oxide and titanium oxide layers having a thickness of 3 to 1000 .ANG.. preferably 5 to 250 .ANG.. Such a combination film has favorable dielectric strength and refraction index properties and is particularly adapted for use in electroluminescence structures.
Claims8
An insulative film for a thin film structure, comprising alternating layers of aluminum oxide (Al.sub.2 O.sub.3) and titanium oxide (TiO.sub.2), said film having between 10 and 200 of said layers, wherein each layer has a thickness in the range of 3 to 1000 .ANG..
Dependencies are inferred from the claim text.