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US 4,484,098 AGranted
Environmentally stable lithium niobate acoustic wave devices
AssigneeUnited Technologies Corporation
InventorsDonald E. Cullen, Thomas W. Grudkowski, Gerald Meltz
Life of this patent
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Abstract
Acoustic Wave Devices comprise lithium niobate substrates 6, 22 having the principal plane cut at zero degrees and 128.degree., respectively, with respect to the Y crystallographic axis thereof, propagating in the X direction, with amorphous silicon dioxide surface layers of 0.42 and 1.24 wavelengths, respectively.
Claims2
An acoustic wave device, comprising:
- a lithium niobate substrate having a principal plane cut at an angle of zero degrees with respect to its Y crystallographic axis with propagation in the X direction;
- electroacoustic transducer metallization disposed on said surface;
- and
- a surface layer of amorphous silicon dioxide disposed on said surface and over said metallization, said layer having a thickness of substantially 0.42 wavelengths of the acoustic wave in said device.
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An acoustic wave device, comprising:
- a lithium niobate substrate having a principal plane cut at at an angle of 128 degrees with respect to its Y crystallographic axis with propagation in the X direction;
- electroacoustic transducer metallization disposed on said surface;
- and
- a surface layer of amorphous silicon dioxide disposed on said surface and over said metallization, said layer having a thickness of substantially 1.24 wavelengths of the acoustic wave in said device.
1 more element
Dependencies are inferred from the claim text.