Accelerometer

An integrated semiconductor accelerometer comprising:

• a semiconductor carrier substrate defining a plane;
• a semiconductor flap member
• only two resilient attachment means coupled to said substrate in opposed and coaxial relationship for mounting said flap for rotation about only one axis, said attachment means providing rotation of said flap member about said one axis in response to an acceleration perpendicular to said plane and causing a return torque to be applied to said flap member, said substrate, said flap member and said attachment means being formed of a single thin piece of monocrystalline silicon with said flap and said attachment means being heavily doped with boron creating longitudinal stresses on the flap attachment means which thus rigidly resist movements of the flap member other than movements about said one axis,
• at least one electrode disposed facing said flap member in a plane parallel to the plane defined by said substrate;
• and
• means for producing a signal which is a function of the distance between said flap member and said electrode and represents acceleration to which said flap member is subjected.