Method for crystallizing films
AssigneeL'Etat Belge, Represente par le Secretaire General des Services de la Programmation de la Politique Scientifique
InventorLucien D. Laude
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Abstract
There is described a method for crystallizing films selected from the group comprising the amorphous elementary semi-conducting films and the polymetallic films comprised of two elements belonging respectively to Groups III and V, or Groups II and VI of the Periodic Table, which comprises irradiating the film surface with a laser beam guided by an assembly from optic fibers which are arranged in parallel relationship with one another, each fiber having a diameter which is not larger than 50.mu., said irradiating causing crystallizing into crystallites which are regularly distributed and closely confined.
Claims31
Method for crystallizing films selected from the group comprising the amorphous elementary semiconducting films and the polymetallic films comprised of two elements belonging respectively to Groups III and V, Groups II and VI of the Periodic Table, which comprises irradiating the film surface with a laser beam guided by an assembly from optic fibers which are arranged in parallel relationship with one another, each fiber having a diameter which is not larger than 50.mu., said irradiating causing crystallizing into crystallites which are regularly distributed and closely confined.
Dependencies are inferred from the claim text.