Ebulliometric hot spot detector
AssigneeRobert D. Hancock
InventorsRobert D. Hancock, Kenneth F. Hollman
Life of this patent
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Abstract
An ebulliometric hot spot detector detects hot spots with a resolution of the order of a micron on semiconductor devices. The device to be tested is operated in a suitable liquid contained in the detector, and the liquid pressure is decreased until boiling from sites on the device is observed. The liquid pressure is then increased until boiling ceases; meanwhile, the boiling sites on the device are observed. Small bubbles observed just before cessation of boiling pinpoint the hot spot locations. The pressure at which boiling ceases in a given liquid determines the hot spot temperature.
Claims22
An ebulliometric hot spot detector for detecting hot spots on a powered electronic device, comprising:
- container means for containing an ebulliometric liquid and a powered electronic device within a chamber, with said electronic device supported submerged in said ebulliometric liquid,
- power means for applying power to said electronic device,
- pressurizing means for establishing and varying pressure in the ebulliometric liquid in said chamber,
- detector means for detecting the onset and termination of bubbling of said ebulliometric liquid in said chamber from the surface of said integrated circuit as said pressure is varied, including means for detecting the location of the sources of said bubbling, and
- output means responsive to said pressure for generating and displaying a signal indicative of said pressure at the time of said termination of bubbling.
An ebulliometric hot spot detector for detecting hot spots on an integrated circuit comprising:
- an ebulliometric liquid,
- container means for containing said ebulliometric liquid and said integrated circuit within a chamber, with said integrated circuit supported submerged in said ebulliometric liquid,
- power means for applying power to said integrated circuit,
- pressurizing means for establishing and varying pressure in said ebulliometric liquid in said chamber,
- detection means for detecting the onset and cessation of bubbling of said ebulliometric liquid in said chamber from the surface of said integrated circuit as said pressure is varied, including means for detecting the location of at least one of the sources of said bubbling, and
- temperature determination means responsive to said pressure for determining the temperature of at least one of the sources of said bubbling.
An ebulliometric method for detecting hot spots on a powered electronic device comprising the steps of:
- submerging a powered electronic device in ebulliometric fluid,
- producing such pressure in said ebulliometric fluid as to produce boiling from said device,
- increasing said pressure until said boiling ceases, and
- observing boiling sites on said device.
Dependencies are inferred from the claim text.