Method of producing semiconductor device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsHideaki Arima, Tadashi Nishimura, Masahiro Yoneda, Takaaki Fukumoto, Yoshihiro Hirata
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Abstract
A method for producing an impurity containing semiconductor substrate includes depositing an impurity on selected portions of the substrate by placing a charge on the substrate and converting a gaseous impurity containing atmosphere into a plasma. The impurity may then be diffused into the substrate to a controlled and shallow depth by employing a laser or the like to selectively irradiate the impurity.
Claims9
A method for producing a conductive layer of a semiconductor device, comprising;
- exposing at least a portion of the surface of a semiconductor substrate, introducing a gas atmosphere including an impurity about said substrate and converting said atmosphere to a plasma state, producing a change in the potential of the semiconductor substrate by irradiating said semiconductor in a beam or shower of electrons, and forming an impurity layer on said exposed surface of the semiconductor substrate, by electrostatically attracting said impurity in the plasma state to said exposed surface.
A method for producing a conductive layer of a semiconductor device, comprising;
- exposing at least a portion of the surface of a semiconductor substrate, introducing a gas atmosphere including an impurity about said substrate and converting said atmosphere to a plasma state, producing a change in the potential of the semiconductor substrate by subjecting the same to irradiation in an electron beam or shower, and forming an impurity layer on the exposed surface of the semiconductor substrate by electrostatically attracting said impurity in the plasma state to said exposed surface due to said change in potential thereof, and subsequently diffusing said impurity layer into the semiconductor substrate by means of a heat treatment performed by irradiating selected portions of said impurity layer with an energy beam.
Dependencies are inferred from the claim text.