Photoconductive member with .alpha.-Si and C, U or D and dopant

A photoconductive member comprising a support for a photoconductive member and an amorphous layer having photoconductivity constituted of an amorphous material comprising silicon atoms as a matrix and at least one of hydrogen atoms and halogen atoms, said amorphous layer having a first layer region containing as the constituent atom at least one kind of atoms selected from the group consisting of oxygen atoms, carbon atoms and nitrogen atoms in a distribution state which is ununiform and continuous in the direction of layer thickness wherein the ununiform distribution is concentrated at the support side and decreases towards the side opposite to the side at which the support is provided and wherein the distribution state is uniform in the direction substantially parallel to surface of said amorphous layer and a second layer region containing atoms belonging to the group III of the periodic table as constituent atoms in a distribution state which is ununiform and continuous in the direction of layer thickness, said first layer region existing internally below the surface of said amorphous layer.