Method of manufacturing a polisher
AssigneeNippon Tenshashi Kabushiki Kaisha
InventorSachiko Ibata
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Abstract
In a method of making a polishing element a photoresist film 2 is first deposited on a surface of metal stock 1. A photomask 3 is then used to selectively cover portions of the deposited photoresist film 2. Thereafter, portions of the photoresist film 2 which are not covered by the photomask 3 are removed in order to leave exposed patterned portions 5 of the metal stock surface. Gulf-shaped recesses 6 are then etched into the exposed portions of the metal stock surface. The formation of gulf-shaped recesses 6 results from the application of a etchant while the metal stock 1 and the etchant are in physical motion relative to one another. After etching, remaining portions of the photoresist film 2 are removed from the metal stock. A polishing element 10 comprising cutting teeth 11 having acute cutting action angles results.
Claims5
A method of making a polishing element comprising the steps of:
- depositing a photoresist film on a coarse surface of metal stock;
- using a photomask to selectively cover portions of said photoresist film;
- removing portions of said photoresist film thereby leaving portions of said metal stock coarse surface uncovered,
- etching recesses in said uncovered portions of said metal stock coarse surface by applying an etchant while said metal stock and said etchant are in physical motion relative to each other, thereby forming cutting teeth having teeth tops lying essentially in the plane of said metal stock coarse surface and teeth sides which at least partially define said recess, the interior angle between said teeth top and teeth side being an acute angle;
- removing remaining portions of said photoresist film from said metal stock;
- and,
- hardening said coarse surface of said metal stock on which said cutting teeth are formed.
Dependencies are inferred from the claim text.