Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity
AssigneeThe United States of America as represented by the United States Department of Energy
InventorsThomas R. Werner, Charles M. Falco, Ivan K. Schuller
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Abstract
A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.
Claims8
A thin-film electrical resistor having a predetermined coefficient of resistance ranging from negative to positive ppm/K comprising:
- a coherent, multilayer crystal consisting of alternating layers of two metallic elements, the two elements being selected from the group of copper and niobium, nickel and tungsten and nickel and molybdenum, the layers being of about the same thickness, each layer consisting of a single crystalline element at least 2 .ANG. in thickness to form a resistor having a negative temperature coefficient to resistance increasing to 0 and becoming positive as the layer thickness is increased.
Dependencies are inferred from the claim text.