Dry vacuum diaphragm pump

Dry vacuum diaphragm pump for transferring a gas from at least one inlet port (2) to at least one exhaust port (3), constituted by a resilient diaphragm (12) retained between a first and second rigid body, in such manner that the volume between the diaphragm (12) and the first rigid body (1) constitutes a pumping chamber (15) into which open the inlet ports and the exhaust ports, and that the volume on the other side of the diaphragm (12) constitutes a control chamber (16) for actuating the diaphragm to cause it to vary the pressure cyclically so as to generate alternatively:

• (a) an exhaust movement in which the diaphragm (12) is forced progressively against the first rigid body (1), thereby first blocking the inlet ports, and then exhausting the gas in the direction of the exhaust ports,
• (b) an intake movement in which the diaphragm (12) is returned toward the second rigid body (11), causing first the closure of the exhaust valves and then clearing the inlet ports,
• wherein the exhaust ports (3) communicate via the valves (7) with a capacity (9) maintained at a pressure lower than atmospheric pressure by an auxiliary vacuum pump (23), and by the fact that the same comprises a distribution mechanism (21, 22) for placing the control chamber (16) alternatively in communication with atmosphere and with the intake of an auxiliary vacuum pump.