US 4,421,381 A · Mechanical vibrating element

Abstract

Herein disclosed is a mechanical vibrating element which can be used as a resonator made operative to resonate in a predetermined frequency, a filter having a frequency selecting property or an optical deflector adapted to be mechanically dislocated in accordance with an input signal for deflecting an optical beam. The mechanical vibrating element according to the present invention is characterized in that a single insulating substrate constructs a frame and a moving portion supported by the frame, in that the moving portion is formed with a conductive pattern or a coil, and in that an electric current is fed to the conductor or the coil, while appling a magnetic field in the same direction as the plane direction of the insulating substrate, so that the moving portions may be mechanically vibrated.

Claims12

Dependent claims

A mechanical vibrating element characterized:

in that a frame and a moving portion supported by said frame are constructed of a single insulating substrate;
in that said moving portion is formed with one or more coils or conductive patterns;
in that both the formations of said frame and said moving portions and the formations of said coils or said conductive patterns are made by photolithographic and etching techniques and in that a current is fed to said coils or conductors, while imparting a magnetic field in the same direction as the plane direction of said insulating substrating, so that said moving portion may be mechanically vibrated.

Dependencies are inferred from the claim text.

Mechanical vibrating element

Life of this patent

Mechanical vibrating element

Life of this patent

Abstract

Claims12