Method of making magnetic material layer

A magnetic material layer manufacturing method comprising the steps of:

• disposing a base member in a reaction chamber between its gas inlet and gas outlet;
• introducing a gas mixture of a raw material compound gas of halogenide or carbonyl of a first magnetic material selected from a group consisting of Fe, Ni and Co, a nitriding gas and a carrier gas of hydrogen into the reaction chamber from the gas inlet while exhausting gas from the reaction chamber through the gas outlet;
• and
• applying plasma generating electrical energy to the gas mixture to produce in the reaction chamber a stream of plasma of the gas mixture, whereby a stream of active reaction products containing active particle of a nitride of the first magnetic material is passed over the base member to deposit thereon amorphous or semi-amorphous particles of the nitride of the first magnetic material, forming a magnetic material layer consisting principally of the amorphous or semi-amorphous particles of the nitride of the first magnetic material.

A magnetic material layer manufacturing method comprising the steps of:

• disposing a base member in a reaction chamber between its gas inlet and gas outlet;
• introducing a gas mixture of a first raw material compound gas of halogenide or carbonyl of a first magnetic material selected from a group consisting of Fe, Ni and Co, a second raw material compound gas of halogenide or carbonyl of a second magnetic material selected from the remaining two of Fe, Ni and Co and a carrier gas of hydrogen into the reaction chamber from the gas inlet while exhausting gas from the reaction chamber through the gas outlet;
• and
• applying plasma generating electrical energy to the gas mixture to produce in the reaction chamber a stream of plasma of the mixture gas, whereby a stream of active reaction products containing active particles of a magnetic material mixture or alloy containing the first and second magnetic materials is passed over the base member to deposit thereon amorphous or semi-amorphous particles of the magnetic material mixture or alloy containing the first and second magnetic materials, forming a magnetic material layer consisting principally of the amorphous or semi-amorphous particles of the magnetic material mixture or alloy.