Face-shear mode quartz crystal vibrators and method of manufacture
AssigneeKabushiki Kaisha Suwa Seikosha
InventorEishi Momosaki
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Abstract
A miniaturized face-shear mode quartz crystal vibrator and method of manufacture is provided. The vibrator is formed from a Y-cut quartz crystal plate less than 500 .mu.m thick which has been rotated between 45.degree. to 55.degree. about the X-axis. A plurality of vibrators are formed by depositing a thin metallic film on the two opposed planar surfaces of the plate, selectively etching portions of the metallic films and dissolving the uncoated portions of the plate. The metallic films become the vibrator electrode.
Claims10
A miniaturized quartz crystal vibrator comprising a rectangular face-shear mode quartz crystal plate having a long-side and a short-side dimension, said plate cut from a single quartz crystal less than 500 .mu.m thick having two opposed principal substantially planar surfaces and four edge surfaces and metallic film electrodes disposed on at least a portion of said opposed planar surfaces, said quartz crystal plate being a Y-cut rotated about the X-axis from 45.degree. to 55.degree. and further rotated an angle of 45.degree. from the X-axis, said quartz crystal plate being formed with a pair of holding portions integrally extending from the two opposed short-side edge surface with said holding portion extending along the long-side of said vibrator for supporting said quartz crystal vibrator and metallic film electrodes disposed on said holding portions.
A miniaturized quartz crystal vibrator comprising a face-shear mode quartz crystal plate cut from a single quartz crystal less than 500 .mu.m thick having two opposed principal substantially planar surfaces and metallic electrodes disposed on at least a portion of said opposed principal planar surfaces, said quartz crystal plate being a Y-cut rotated about the X-axis, and said quartz crystal vibrator including at least one conductive support member and metallic ball means bonded between said quartz crystal vibrator and said support member by thermo-compression.
A miniaturized quartz crystal vibrator comprising a face-shear mode quartz crystal plate cut from a single quartz crystal less than 500 .mu.m thick having two opposed principal substantially planar surfaces and metallic thin films for forming electrodes deposited on at least a portion of said opposed principal planar surfaces, said quartz crystal plate being a Y-cut rotated about the X-axis from 45.degree. to 55.degree. and further rotated an angle of 45.degree. from the X-axis and at least a portion of said metallic films selectively removed from each planar surface to form at least two isolated metallic film regions, a first electrode region and a second non-electrode on that surface to change the direction of the electric field of the vibrator for adjusting the temperature-frequency characteristics of said vibrator.
Dependencies are inferred from the claim text.