Purification of silicon source materials
AssigneeMotorola, Inc.
InventorsRobert D. Darnell, William M. Ingle
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Abstract
A process is disclosed for the purification of trichlorosilane and other silicon source materials. Trace impurities of boron and phosphorous are removed from trichlorosilane or dichlorosilane by reacting small amounts of oxygen with the trichlorosilane or dichlorosilane at a temperature between about 60.degree. C. and 300.degree. C. The oxygen reacts with the Si--H bond in HSiCl.sub.3 or H.sub.2 SiCl.sub.2 to form a "SiOH" species which in turn complexes impurities such as BCl.sub.3 or PCl.sub.3 present in the chlorosilane. Purification of the chlorosilane is then easily accomplished during a subsequent distillation step which separates the purified chlorosilane from the less volatile complexed boron or phosphorous compounds.
Claims11
A process for removing dopant impurity including one or more of boron, phosphorous, arsenic and aluminum in the form of chlorides, hydrides, or intermediate compounds containing both hydrogen and chlorine from a silicon source material including trichlorosilane or dichlorosilane which comprises the steps of:
- heating said material in gaseous form to a temperature between about 170.degree. C. and about 500.degree. C. with oxygen to form impurity containing siloxane complexes;
- and separating said complexes from said source material.
A process for removing dopant impurity including one or more of boron, phosphorous, arsenic, and aluminum in the form of chlorides, hydrides or intermediate compounds containing both hydrogen and chlorine from a silicon source material including dichlorosilane which comprises the steps of:
- heating said material in gaseous form to a temperature between about 60.degree. C. and about 300.degree. C. with oxygen to form impurity containing siloxane complexes;
- and separating said complexes from said source material.
Dependencies are inferred from the claim text.