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AssigneeCarl-Zeiss-Stiftung
InventorsWerner Schmidt, Gerhard Mueller, Klaus Weber, Volker Wilke
Estimating the term…
The invention contemplates scanning-microscope display of plural observed parameters of an examined specimen, where the parameters derive from flying-spot light-exposure of the specimen, and where at least one of the observed parameters is outside the wavelength range of the flying-spot. In some illustrative embodiments, at least one of the observed parameters is sensed by a detector which uses the same scanning optics as the flying-spot, and in other embodiments other techniques of synchronization are involved. The disclosed embodiments also provide for selective arrest of scanning to enable such factors as fading fluorescence and spectrum analysis to be ascertained strictly for a surface occlusion, impurity or other anomaly of interest.
A method for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which method the specimen is scanned in raster form on the illumination side by a beam of light, and radiation coming from the specimen is detected in phase with the raster, characterized by the fact that at least two different radiation components are detected, at least one of which radiation components lies in a spectral region not used on the illumination side and at least one of said components is focused, via the objective (17, 25, 113) used to focus the scanning beam and via the scanning unit (3, 23, 53, 120) used for its deflection, the focus being at a stationary receiver (13, 29, 47, 63, 116).
Apparatus for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which apparatus the specimen is scanned on the illumination side by a beam of light, and radiation emitted by the specimen and not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that, between the source of light and the specimen (4, 24, 44, 119) there are, first a splitting mirror (5, 22, 104), and then means (3, 23, 120) for the raster-like deflection of the beam of light, and then an objective (17, 25, 113) for focusing the light beam on the specimen, and further characterized by the fact that radiation coming from the specimen is focused on at least one stationary detector (13, 29, 47, 116), the latter focus being via the objective (17, 25, 113), the deflection means (3, 23, 120), and the splitter mirror (5, 22,104).
Apparatus for the light-induced scanning-microscope display of specimen parameters and of their distribution, in which apparatus the sample is scanned on the illumination side by a beam of light, and sample-emitted radiation which is not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that, between the source of light and the specimen (4, 24, 44, 119), there are, first, a splitting mirror (5, 65, 104), and then means (3, 23, 120) for the raster-like deflection of the beam of light, and then an objective (113) of focusing the light beam on the specimen, further characterized by the fact that radiation coming from the specimen is focused via the objective, the deflection means and the splitting mirror on at least one first stationary detector (63), and further characterized by the fact that at least one second receiver (55) sensitized to radiation outside the spectral region used for illumination is positioned outside of the optical system containing the deflection unit (53) in front of or behind the specimen (54).
Apparatus for the light-induced scanning-microscope display of parameters and of their distribution, in which apparatus the specimen is scanned on the illumination side by a beam of light, and radiation emitted from the specimen and not contained in the illumination-side spectral region is detected in phase with the scanning raster, characterized by the fact that behind a light-emitting diode array (121) as the source of light, there are arranged a splitting mirror (122) and, following it, an objective (123) for focusing the source of light (121) into the object plane, further characterized by the fact that radiation coming from the specimen (124) is focused by the objective (123) and the splitting mirror (122) onto a detector diode array (125), and that an electronic arrangement (126) is provided for synchronous scanning of diodes (127, 128) on the two arrays (121, 125) conjugated in each case by the optics (122, 123).
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