# US 4,400,454 A · Process of producing color solid image pickup element base plates > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 4,400,454 A - Document ID: US4400454A - Status: Granted - Kind: A - Application number: 06/399,090 - Filed: 1982-07-16 - Granted: 1983-08-23 - Earliest claimed: 1981-07-16 - Assignees: Fuji Photo Film Co., Ltd. - Inventors: Masamichi Sato; Eiichi Hasegawa; Koji Shimanuki - Web page: https://patentgrep.com/patent/US4400454A ## CPC - G03C 7/12: by photo-exposure {(photomechanical production of optical colour artifacts such as colour screens, for purposes other than for additive colour photography G03F7/0007)} - G03C: PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES (for photomechanical purposes G03F); PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY (photographic processes characterised by the use or manipulation of apparatus classifiable per se in subclass G03B, see G03B; photomechanical production of textured or patterned surfaces G03F; electrophotography, magnetography G03G) ## Abstract A multicolor solid image pickup element having bonding pat portions is prepared by an on-wafer method utilizing a silver halide photographic emulsion. A solvent permeating preventing layer is formed on a solid image pickup element base plate having an array of image elements. A silver halide emulsion layer is then formed in the layer, and the emulsion layer is removed at the portions corresponding to the bonding pat portions of the base plate. A micro color filter composed of two or more color separation filter elements is then formed in the emulsion layer by applying thereto a repeating pattern exposure, followed by color development. Each of the color filter elements corresponds to each image element, and a protective layer is formed on the whole surface of the base plate. The protective layer and the solvent permeation preventing layer are then successively removed at the portions corresponding to the bonding pat portions. ## Claims ### Claim 1 A process of producing a color solid image pickup element base plate comprising the steps of: coating a solvent permeation preventing layer formed on the surface of a solid image pickup element base plate with a silver halide emulsion layer, removing the silver halide emulsion layer at portions corresponding to bonding pat portions of the solid image pickup element base plate to reveal the solvent permeation preventing layer at the portions, forming a micro color filter composed of at least two-color color separation filter elements corresponding to each image element of the solid image pickup element base plate by repeatedly applying an image exposure and a color development to the remaining silver halide emulsion layer for each color, forming a protective layer on the whole surface of the solid image pickup element base plate having the micro color filter thus formed thereon, and removing the protective layer and the solvent permeation preventing layer at the portions corresponding to the bonding pat portions of the solid image pickup element base plate to reveal the bonding pat portions. ### Claim 2 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the silver halide emulsion layer is formed by spin coating a silver halide emulsion on the base plate. ### Claim 3 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the solid image pickup element base plate has a large number of image pickup elements on the same base plate. ### Claim 4 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the step of forming a micro color filter includes a process of developing the silver halide emulsion layer using a color coupler-containing developer. ### Claim 5 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the step of forming a micro color filter includes a process of developing the silver halide emulsion layer using a developer containing a dye developer. ### Claim 6 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the step of removing the silver halide emulsion layer at the portions corresponding to the bonding pat portions is the step of performing an etch-bleaching procedure after forming silver grains at the portions of image exposing and developing the silver halide emulsion layer at the portions. ### Claim 7 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the step of removing the silver halide emulsion layer at the portions corresponding to the bonding pat portions includes removing the swelled or thickened portion of the silver halide emulsion layer at the peripheral portion of the base plate. ### Claim 8 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the step of removing the silver halide emulsion layer at the portions corresponding to the bonding pat portions includes the step of removing the silver halide emulsion layer at portions to be diced. ### Claim 9 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the solvent permeation preventing layer is composed of phosphosilicate glass. ### Claim 10 (depends on 1) The process of producing a color solid image pickup element base plate as claimed in claim 1 wherein the protective layer is composed of a photoresist. ### Claim 11 (depends on 1) The process for producing a color solid image pickup element base plate as claimed in claim 1 wherein the silver halide emulsion layer has a thickness of from about 0.8 .mu.m to about 10 .mu.m. ### Claim 12 (depends on 1) The process for producing a color solid image pickup element base plate as claimed in claim 1 wherein a subbing layer is positioned between the silver halide emulsion layer and the solvent permeation preventing layer.