# US 4,399,194 A · Transparent conductive film

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- Number: US 4,399,194 A
- Document ID: US4399194A
- Status: Granted
- Kind: A
- Application number: 06/335,708
- Filed: 1981-12-30
- Granted: 1983-08-16
- Earliest claimed: 1981-12-30
- Assignees: RCA Corporation
- Inventors: Joseph Zelez; John L. Vossen, Jr.
- Web page: https://patentgrep.com/patent/US4399194A

## CPC

- G02F 1/13439: {characterised by their electrical, optical, physical properties; materials therefor; method of making}
- C03C 17/23: Oxides (C03C17/02 takes precedence)
- C03C 17/245: by deposition from the vapour phase
- H01B 1/08: oxides
- H10F 71/138: {Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes}
- C03C 2217/23: Mixtures
- C03C 2218/152: by cvd
- C03C 2218/154: by sputtering
- C03C 2218/32: After-treatment
- Y02E 10/50: Photovoltaic [PV] energy
- Y10T 428/31678: Of metal
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- H01B: CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES (selection for magnetic properties H01F1/00; waveguides H01P {; printed circuits H05K})
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- Y02E: REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

Transparent conductive films of indium oxide and zirconium oxide, methodology for annealing them and an etchant therefor are disclosed.

## Claims

### Claim 1

An article comprising a transparent conductive film comprised of indium oxide and zirconium oxide on a suitable substrate.

### Claim 2 (depends on 1)

An article in accordance with claim 1, wherein the film is comprised of from about 40 percent to about 60 percent by weight of indium oxide and from about 40 percent to about 60 percent by weight of zirconium oxide.