# US 4,399,015 A · Method for fabricating an indium tin oxide film for a transparent electrode

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- Number: US 4,399,015 A
- Document ID: US4399015A
- Status: Granted
- Kind: A
- Application number: 06/344,520
- Filed: 1982-02-01
- Granted: 1983-08-16
- Earliest claimed: 1981-02-03
- Assignees: Sharp Kabushiki Kaisha
- Inventors: Yoshihiro Endo; Yoshito Yamashita; Hiroshi Kishishita; Hisashi Uede
- Web page: https://patentgrep.com/patent/US4399015A

## CPC

- C23C 14/086: {of zinc, germanium, cadmium, indium, tin, thallium or bismuth}
- C03C 17/2453: {Coating containing SnO2}
- C23C 14/58: After-treatment
- C23C 14/5806: {Thermal treatment}
- G02F 1/13439: {characterised by their electrical, optical, physical properties; materials therefor; method of making}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

A method for fabricating an indium tin oxide (ITO) film comprises depositing the ITO film on a heat-resisting substrate by sputtering using a metal alloy target of In-Sn in an atmosphere including an active gas, and heat-treating the ITO film at about 550-650 degrees Centigrade in an oxygen-free atmosphere. Preferably, the heat-resisting substrate comprises an aluminoborosilicate glass. Further, sputtering, preferably reactive sputtering, is employed.

## Claims

### Claim 1

A method for fabricating an indium tin oxide (ITO) film, comprising:
depositing the ITO film on a heated substrate which is heat-resistant by sputtering using a metal alloy target of In-Sn in an atmosphere including an active gas having a moderate partial pressure of oxygen; and
heat-treating the ITO film at about 550.degree.-650.degree. C. in an oxygen-free atmosphere.

### Claim 2 (depends on 1)

The method of claim 1, wherein the heat-resistant substrate comprises an aluminoborosilicate glass.

### Claim 3 (depends on 1)

The method of claim 1, wherein the sputtering of the ITO film is effected by reaction sputtering.

### Claim 4 (depends on 3)

The method of claim 3, wherein the sputtering of the ITO film is effected by D.C. planar magnetron sputtering.

### Claim 5 (depends on 1)

A product produced by the method of claim 1.

### Claim 6 (depends on 2)

A product produced by the method of claim 2.

### Claim 7 (depends on 3)

A product produced by the method of claim 3.

### Claim 8 (depends on 4)

A product produced by the method of claim 4.

### Claim 9 (depends on 1)

The method of claim 1, wherein the active gas includes argon and oxygen.

### Claim 10 (depends on 1)

The method of claim 1, wherein the partial pressure of oxygen is about 1.times.10.sup.-4 to 1.times.10.sup.-3 Torr.