Stable liquid polymeric precursor to silicon nitride and process
AssigneeMassachusetts Institute of Technology
InventorsDietmar Seyferth, Christian C. Prud'Homme, Gary H. Wiseman
Life of this patent
Estimating the term…
Abstract
Stable, viscous polymers of silicon, nitrogen and hydrogen are formed by reacting a halosilane with ammonia in the presence of a solvent comprising an aliphatic ether, a chloromethane or mixtures thereof. After the solvent has been removed from the reaction product, the polymer can be poured into a container of desired shape and then can be sintered to form a uniform silicon nitride product.
Claims6
A stable liquid, halide-free polymer of silicon, hydrogen and nitrogen prepared by reacting in the absence of oxygen and moisture a dihydrodihalosilane with ammonia in a solvent selected from the group consisting of an ether, a chloromethane and mixtures thereof to form the soluble liquid polymer and insoluble precipitated ammonium halide, separating the soluble liquid polymer from the insoluble ammonium halide in an oxygen and moisture-free atmosphere to obtain a soluble liquid polymer solution free of ammonium halide and subsequently recovering the polymer free of ammonium halide from the solvent.
Dependencies are inferred from the claim text.