# US 4,397,813 A · Apparatus for manufacturing single crystals

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- Number: US 4,397,813 A
- Document ID: US4397813A
- Status: Granted
- Kind: A
- Application number: 06/336,708
- Filed: 1982-01-04
- Granted: 1983-08-09
- Earliest claimed: 1981-01-17
- Assignees: Tokyo Shibaura Denki Kabushiki Kaisha
- Inventors: Syoichi Washizuka; Jisaburo Ushizawa; Yoshihiro Kokubun; Tsuguo Fukuda
- Web page: https://patentgrep.com/patent/US4397813A

## CPC

- C30B 15/28: using weight changes of the crystal or the melt, e.g. flotation methods
- C30B 27/02: by pulling from a melt
- Y10T 117/1008: with responsive control means
- Y10T 117/1068: including heating or cooling details [e.g., shield configuration]
- Y10T 117/1072: including details of means providing product movement [e.g., shaft guides, servo means]
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

The invention provides a method and an apparatus for manufacturing single crystals wherein the weight of the single crystal pulled is measured by a weight detector. The measured weight is compared with a reference weight signal which is generated from a reference weight signal generator. A weight deviation signal representing a difference between these two signals is generated by a weight deviation detector. The weight deviation signal is differentiated by a first differentiation circuit and a differentiation output signal obtained is corrected for compensation for the buoyancy of the liquid encapsulant by a signal which is generated by a buoyancy correction signal generator. A corrected signal thus obtained is differentiated by a second differentiation circuit and is thereafter added to the corrected signal. The addition result is phase-compensated by a phase-compensating circuit. The phase-compensated signal is supplied to a heating control circuit. At the same time, the heating control circuit generates a heating control signal to a heating device in response to a program signal which is generated from a program signal generator. In response to the output signal from the heating device, a heater which controls the temperature of the melt held in a vessel and which is arranged outside the vessel is heated according to the program.

## Claims

### Claim 1

An apparatus for manufacturing single crystals comprising:
first means for pulling a single crystal from a melt held in a vessel holding a melt and a liquid encapsulant;
second means for measuring a weight of the single crystal pulled by said first means;
third means for generating a reference weight signal corresponding to a reference weight of the single crystal;
fourth means for generating a weight deviation signal by comparing a weight signal of the single crystal obtained from said second means with the reference weight signal obtained from said third means;
fifth means for differentiating the weight deviation signal obtained from said fourth means to provide a differentiation output signal;
sixth means for receiving the reference weight signal from said third means and the differentiation output signal from said fifth means, for converting a buoyancy of said liquid encapsulant influencing the single crystal pulled into a weight/time signal corresponding to the buoyancy, and for generating a buoyancy correction signal;
seventh means for receiving the differentiation output signal from said fifth means and the buoyancy correction signal from said sixth means, for subtracting the buoyancy correction signal from the differentiation output signal, and for generating a signal corresponding to a true diameter fluctuation of the single crystal;
eighth means for differentiating the signal from said seventh means to generate a differentiation output signal;
ninth means for adding the differentiation output signal from said eighth means and the signal from said seventh means;
tenth means for phase-compensating a signal obtained from said ninth means to generate a phase-compensated signal to make a thermal response of the melt early;
eleventh means for receiving the phase-compensated signal from said tenth means and generating a heating control signal for the melt; and
twelfth means for heating the melt in response to the heating control signal from said eleventh means.

### Claim 2 (depends on 1)

An apparatus according to claim 1, wherein said twelfth means for heating the melt comprises a first heater which heats the melt in response to the heating control signal, and a second auxiliary heater which is interposed between said first heater and said vessel; and said eleventh means comprises a first heating device connected to said first heater, a first heating control circuit which supplies the phase-compensated signal and a heating control signal according to a heating program to said first heating device, a second heating device connected to said second auxiliary heater, a second heating control circuit which supplies the heating control signal according to the program to said second heating device, and heating program generating means, connected to said first and second heating control circuits, for generating a program signal according to the heating program for the melt.