# US 4,397,260 A · Boat for the epitaxial growth of several layers from the liquid phase

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- Number: US 4,397,260 A
- Document ID: US4397260A
- Status: Granted
- Kind: A
- Application number: 06/254,671
- Filed: 1981-04-16
- Granted: 1983-08-09
- Earliest claimed: 1980-04-23
- Assignees: U.S. Philips Corporation
- Inventors: Marc Mahieu; Jacques Varon; Philippe Vandenberg
- Web page: https://patentgrep.com/patent/US4397260A

## CPC

- C30B 19/063: {Sliding boat system}
- C30B: SINGLE-CRYSTAL GROWTH (by using ultra-high pressure, e.g. for the formation of diamonds, B01J3/06); UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL (zone-refining of metals or alloys C22B); PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (casting of metals, casting of other substances by the same processes or devices B22D; working of plastics B29; modifying the physical structure of metals or alloys C21D, C22F); SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE (for producing semiconductor devices or parts thereof H10); APPARATUS THEREFOR

## Abstract

A boat for the epitaxial growth of several layers on a substrate includes reservoirs present over a slide in the boat, as well as substrates on a base plate in the boat. A fixedly arranged plate is placed between the base plate and the slide, which fixedly arranged plate and slide include communication windows for liquid solutions in the reservoirs to act on the substrates. Applications of this invention are epitaxial growth of several layers in general, and in particular, the manufacture of plates for opto-electronic semiconnector devices.

## Claims

### Claim 1

A boat for epitaxial growth from the liquid phase of successive semiconductor layers on at least one semiconductor substrate, said boat comprising
a fixed base plate having a recessed surface for supporting at least one substrate,
a flat slide provided above said fixed base plate, said slide being movable through a wall of the boat over said base plate,
at least one reservoir containing liquid solution for epitaxial growth and being fixed at one end of said boat, said slide supporting said liquid solution in said reservoir, and
a fixed flat plate placed between said base plate and said slide, said flat plate having at least one window through its surface,
said slide having a plurality of communication windows through its surface for respectively admitting said liquid solution to said substrate and discharging said liquid solution from said substrate.

### Claim 2 (depends on 1)

A boat according to claim 1, wherein a plurality of said reservoirs are provided, and wherein said slide has a single admission window and the same number of discharge windows as the number of said reservoirs.

### Claim 3 (depends on 1, 2)

A boat according to one of claims 1 or 2, wherein said fixed flat plate extends over the entire base plate, and wherein said flat plate has an equal number of windows as the number of said reservoirs at one end of said flat plate and a single window at an opposite end of said flat plate.

### Claim 4 (depends on 3)

A boat according to claim 3, wherein said windows in said flat plate are separated at the same distance as said communication windows of said slide.

### Claim 5 (depends on 3)

A boat according to claim 3, wherein said single window of said flat plate is provided for discharging liquid solution from said substrate, and is located approximately at the end of said boat opposite to said reservoirs.

### Claim 6 (depends on 3)

A boat according to claim 3, wherein said slide provides the bottom surface of said reservoir, and said slide is movable relative to said reservoir.

### Claim 7 (depends on 1, 2)

A boat according to one of claims 1 or 2, wherein said flat plate is only located over said base plate at areas free of said reservoir, and wherein said flat plate only has one window for discharging said liquid solution from said substrate.

### Claim 8 (depends on 7)

A boat according to claim 7, wherein said slide has an extension adjacent to said base plate at least below said reservoir.