# US 4,396,861 A · High voltage lead-through

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- Number: US 4,396,861 A
- Document ID: US4396861A
- Status: Granted
- Kind: A
- Application number: 06/184,524
- Filed: 1980-09-05
- Granted: 1983-08-02
- Earliest claimed: 1980-08-05
- Assignees: Carl-Zeiss-Stiftung
- Inventors: Dietrich Hoffmeister; Wilhelm Egle
- Web page: https://patentgrep.com/patent/US4396861A

## CPC

- H01J 37/248: Components associated with high voltage supply
- H01J 37/06: Electron sources; Electron guns
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

The invention contemplates lead-through structure for the high-voltage electrode of an electron microscope or the like, in conjunction with shaping of the high-voltage electrode and of the body of insulating material via which the lead-through is supported, in reference to metal envelope structure. The high-voltage electrode has a step-wise enlargement, and the surface of the insulating material which is exposed to the vacuum commences at the start of the step-wise enlargement. As a result, the field strength along the vacuum-exposed insulator surface is so influenced that a minimum electric field strength is produced at the boundary line between the vacuum and the high-voltage electrode. The further result is to prevent occurrence of microdischarges.

## Claims

### Claim 1

A high-voltage lead-through construction for introducing a high voltage through an evacuated envelope and into the evacuated interior thereof, said construction comprising a tubular metal envelope portion, a high-voltage electrode including a first tubular portion within and uniformly spaced from said tubular metal envelope portion, and a body of solid insulating material filling the space between said tubular portions, said electrode further including a second and smaller tubular portion having an integrally formed step-reducing portion extending with vacuum exposure within said envelope portion, said body of insulating material extending within and being circumferentially bonded to said envelope portion in at least part of the region of smaller tubular-portion overlap by said envelope portion, and the vacuum-exposed end of said insulating body being characterized by a radially inward convergence in the direction of and substantially to juncture of said smaller tubular portion with said reducing portion.

### Claim 2 (depends on 1)

The construction of claim 1, in which the angle of said convergence at approach to said juncture is approximately one half the effective angle between said smaller tubular portion and said reducing portion.

### Claim 3 (depends on 1)

The construction of claim 1, in which the vacuum-exposed end of said insulating body is further characterized by an integrally formed dependent skirt in more closely spaced relation to said envelope portion than to said smaller tubular portion.

### Claim 4 (depends on 3)

The construction of claim 3, in which said skirt projects at least in full longitudinal overlap with the vacuum-exposed end of said smaller tubular portion.

### Claim 5 (depends on 1)

The construction of claim 1, in which, in the region of radially spaced overlap between said envelope portion and said first tubular portion, said radial spacing and therefore said body thickness is substantially the thickness needed essentially only for electrical insulation in said region of first-tubular-member overlap.

### Claim 6 (depends on 1)

The construction of claim 1, in which said insulator body is a cast resin with a filling composition.

### Claim 7 (depends on 1)

The construction of claim 1, in which said insulator body is of ceramic material.

### Claim 8 (depends on 1)

The construction of claim 1, in which the vacuum-exposed surface of said body is of roughened texture.

### Claim 9

A high-voltage lead-through construction for introducing a high voltage through an evacuated envelope and into the evacuated interior thereof, said construction comprising a tubular metal envelope portion, a high-voltage electrode including a cylindrical portion extending from a base end and with vacuum exposure within said envelope portion, said electrode base end including an integral generally radially outward enlargement having a peripheral contour uniformly spaced from and within said envelope portion, and a body of solid insulating material bonded to said enlargement and filling the space to said envelope portion, said body extending within and being circumferentially bonded to said envelope portion in at least part of the region of cylindrical-portion overlap by said envelope portion, and the vacuum-exposed end of said insulating body being characterized by a radially inward convergence in the direction of and substantially to juncture of said cylindrical portion with said generally radially outward enlargement.

### Claim 10 (depends on 9)

The construction of claim 9, in which said generally radially outward enlargement is a flange embedded in said body of insulating material.

### Claim 11 (depends on 10)

The construction of claim 10, in which said flange is apertured with insulating body material in the apertures of said flange.

### Claim 12 (depends on 10)

The construction of claim 10, in which said envelope portion has a local side-access port in axial registration with said flange, said body of insulating material closing said access port with electrical high-voltage access to a locally exposed portion of said flange.
