# US 4,394,183 A · Solidification of molten materials > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 4,394,183 A - Document ID: US4394183A - Status: Granted - Kind: A - Application number: 06/322,575 - Filed: 1981-11-18 - Granted: 1983-07-19 - Earliest claimed: 1981-11-18 - Assignees: Bell Telephone Laboratories, Incorporated - Inventors: Kenneth A. Jackson; Lionel C. Kimerling - Web page: https://patentgrep.com/patent/US4394183A ## CPC - H10W 20/021: {of interconnections within wafers or substrates} - H10P 95/50: {Alloying conductive materials with semiconductor bodies} - Y10S 117/904: Laser beam - Y10S 117/905: Electron beam - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ## Abstract This invention is a technique for forming a specifically configured region of material which is rejected by an advancing freezing front within a melt. Resolidification of the molten material is effected in such a manner that liquid-solid interfaces intersect so as to control the shape and location of the rejected material which solidifies. Specific embodiments involve the formation of wires, tubes, or planes of enriched rejected material. Applications include the formation of enriched conductive material for making electrical contact between internal or external regions of electronic devices. Additionally, enriched material with etching properties different than that of the surrounding material may be formed and subsequently etched away in micro-machining applications. ## Claims ### Claim 1 A method comprising establishing, within an at least two component molten material, an advancing freezing interface which is curved, with at least two tangents from portions of the interface which intersect, the solubility of at least one of the components of the melt being higher in the melt phase than in the solid phase, whereby the at least one component solidifies along the locus of intersecting tangents, with an enriched concentration higher than the average concentration of that component taken over the entire initial molten zone just before the onset of solidification. ### Claim 2 (depends on 1) The method of claim 1 wherein the concentration in substantially the entire melt phase of the at least one component is greater than the liquidus concentration for all temperatures of the melt phase. ### Claim 3 (depends on 1) The method of claim 1 wherein the concentration in the melt phase of the at least one component is greater than the solubility limit of that component in the solid phase. ### Claim 4 (depends on 1, 2, 3) The method of claims 1 through 3 wherein at least one dimension of the solidified enriched component is less than that of the molten zone. ### Claim 5 (depends on 4) The method of claim 4 wherein the shape of the solidified enriched material is substantially cylindrical, tubular, or planar. ### Claim 6 (depends on 4) The method of claim 4 wherein the enriched solidified material is cylindrical with at least one dimension less than 25 percent of that of the molten region. ### Claim 7 (depends on 6) The method of claim 6 wherein the at least one dimension is the diameter dimension and is less than 10 microns. ### Claim 8 (depends on 5) The method of claim 5 wherein the enriched region is adjacent to a solidified alloy material comprising the at least one component. ### Claim 9 (depends on 6) The method of claim 6 wherein the conductivity properties of the solidified enriched material and the alloy material are different. ### Claim 10 (depends on 9) The method of claim 9 wherein the enriched material is conductive. ### Claim 11 (depends on 5) The method of claim 5 wherein the etching properties of the solidified enriched material and the alloy material differ by at least a factor of 10 for at least one etchant. ### Claim 12 (depends on 4) The method of claim 4 wherein the molten material is heated with a point heat source which is removed to initiate freezing of the molten zone. ### Claim 13 (depends on 12) The method of claim 12 wherein the point heat source is a focused light beam, an ion beam, and an electron beam, a resistor heat source, or a laser beam. ### Claim 14 (depends on 13) The method of claim 13 wherein the molten material is transferred to a casting body prior to solidification. ### Claim 15 (depends on 13) The method of claim 13 wherein the molten material is rendered molten using a point heat source. ### Claim 16 (depends on 15) The method of claim 15 wherein the molten material is refrozen without being transferred to a second body. ### Claim 17 (depends on 16) The method of claim 16 wherein the molten region is rendered molten using a temperature gradient zone melting process. ### Claim 18 (depends on 17) The method of claim 17 wherein the at least one component material is drawn into the molten region from one side of the melt. ### Claim 19 (depends on 18) The method of claim 18 wherein the molten region comprises within a semiconductor body. ### Claim 20 (depends on 19) The method of claim 19 wherein the semiconductor body comprises silicon. ### Claim 21 (depends on 20) The method of claim 20 wherein the at least one component comprises aluminum. ### Claim 22 (depends on 21) The method of claim 21 wherein the point heat source is a CO.sub.2 laser emitting 10.6 micron light. ### Claim 23 (depends on 22) The method of claim 22 wherein the molten zone is cylindrical with a diameter greater than 20 microns. ### Claim 24 (depends on 23) The method of claim 23 wherein an aluminum rich wire has a diameter less than 10 microns formed.