# US 4,393,160 A · Aqueous developable poly(olefin sulfone) terpolymers

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- Number: US 4,393,160 A
- Document ID: US4393160A
- Status: Granted
- Kind: A
- Application number: 06/347,107
- Filed: 1982-02-09
- Granted: 1983-07-12
- Earliest claimed: 1980-12-23
- Assignees: RCA Corporation
- Inventors: Thomas R. Pampalone
- Web page: https://patentgrep.com/patent/US4393160A

## CPC

- G03F 7/039: Macromolecular compounds which are photodegradable, e.g. positive electron resists (G03F7/075 takes precedence; macromolecular quinonediazides G03F7/023)
- C08G 75/22: Copolymers of sulfur dioxide with unsaturated aliphatic compounds
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- C08G: MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS

## Abstract

This invention relates to novel terpolymers of 3-methylcyclopentene, 2-cyclopentene-1-acetic acid and sulfur dioxide. Positive electron beam resist media prepared from the subject terpolymers possesses excellent sensitivity and development latitude and unexpectedly are developable with conventional aqueous alkaline developers.

## Claims

### Claim 1

A positive electron beam resist terpolymer comprising a monomer component and sulfur in a 1:1 molar ratio, said monomer component being comprised of from about 70 mole percent to about 93 mole percent of 3-methylcyclopentene and from about 7 mole percent to about 30 mole percent of 2-cyclopentene-1-acetic acid.

### Claim 2 (depends on 1)

The terpolymer in accordance with claim 1, wherein said monomer component comprises from about 80 mole percent to about 85 mole percent of 3-methylcyclopentene and from about 15 mole percent to about 20 mole percent of 2-cyclopentene-1-acetic acid.

### Claim 3 (depends on 1)

A composition suitable for the production of an aqueous developable positive electron beam recording medium comprising a terpolymer according to claim 1, and a suitable solvent therefore.

### Claim 4 (depends on 3)

The composition in accordance with claim 3, wherein said composition contains from about 4 percent by weight to about 10 percent by weight of said terpolymer.

### Claim 5 (depends on 4)

The composition in accordance with claim 4, wherein said composition contains from about 6 percent by weight to about 8 percent by weight of said terpolymer.

### Claim 6 (depends on 3)

The composition in accordance with claim 3, wherein said solvent is 2-methoxyethylacetate or cyclopentanone.

### Claim 7 (depends on 6)

The composition in accordance with claim 6, wherein said solvent is 2-methoxyethylacetate.