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US 4,393,095 AGranted
Chemical vapor deposition of vanadium oxide coatings
AssigneePPG Industries, Inc.
InventorCharles B. Greenberg
Life of this patent
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Abstract
A method is disclosed for the chemical vapor deposition of vanadium oxide film on glass substrates, as well as a thermochromic VO.sub.2 film for the variable transmittance of solar energy and a conductive V.sub.2 O.sub.3 film, both formed by chemical vapor deposition employing liquid vanadium compounds.
Claims17
A method for the chemical vapor deposition of vanadium oxide films comprising the steps of:
- a. heating a glass substrate to a sufficient temperature to convert a vanadium compound to vanadium oxide;
- b. vaporizing a liquid vanadium compound;
- c. contacting a surface of said heated glass substrate with the vapor of said vanadium compound to deposit a vanadium oxide film on the glass surface.
A method for depositing a vanadium oxide film comprising the steps of:
- a. heating a glass substrate to a temperature of at least about 350.degree. C.;
- b. vaporizing vanadium i-propylate;
- c. conveying the vaporized vanadium i-propylate in a stream of nonoxidizing gas to the substrate;
- d. contacting a surface of said heated glass substrate with the vaporized vanadium i-propylate in a nonoxidizing atmosphere to deposit thereupon a vanadium oxide film;
- and
- e. cooling the vanadium oxide coated glass in a reducing gas atmosphere to obtain a thermochromic film containing VO.sub.2.
3 more elements
A method for depositing a vanadium oxide film comprising the steps of:
- a. heating a glass substrate to a temperature of at least about 300.degree. C.;
- b. vaporizing vanadium i-propylate;
- c. conveying the vaporized vanadium i-propylate in a stream of inert gas to the substrate;
- d. contacting a surface of the substrate with the vaporized vanadium i-propylate to form a vanadium oxide film;
- and
- e. cooling the vanadium oxide coated glass in air to obtain a film containing V.sub.2 O.sub.5.
3 more elements
A method for making a conductive coated glass article comprising the steps of:
- a. heating a glass substrate to a temperature of at least about 400.degree. C.;
- b. vaporizing vanadium n-propylate;
- c. conveying said vaporized vanadium n-propylate to said substrate in a stream of nitrogen;
- d. contacting a surface of said heated glass substrate with the vaporized vanadium n-propylate to deposit thereupon a film containing V.sub.2 O.sub.3 ;
- and
- e. cooling the coated glass article in an atmosphere insufficiently oxidizing to convert the V.sub.2 O.sub.3 to VO.sub.2.
3 more elements
Dependencies are inferred from the claim text.