# US 4,391,678 A · Methods of making infrared detector array cold shield

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- Number: US 4,391,678 A
- Document ID: US4391678A
- Status: Granted
- Kind: A
- Application number: 06/322,503
- Filed: 1981-11-18
- Granted: 1983-07-05
- Earliest claimed: 1981-11-18
- Assignees: The United States of America as represented by the Secretary of the Army
- Inventors: Wallace L. Freeman
- Web page: https://patentgrep.com/patent/US4391678A

## CPC

- H10F 71/00: Manufacture or treatment of devices covered by this subclass (patterning processes to connect thin photovoltaic cells in integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/33; manufacture or treatment of encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells H10F19/80; manufacture or treatment of integrated devices, or assemblies of multiple devices, comprising at least one element in which radiation controls the flow of current H10F39/00)
- H10F 71/129: {Passivating}
- H10F 77/334: {for shielding light, e.g. light blocking layers or cold shields for infrared detectors}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

An infrared detector array is covered by an insulation subcoat atop which o metal layers are applied. The first layer is a thin sputtered or evaporated layer atop which the thick layer is electroplated. Holes through the metal layers uncover the individual detectors of the array.

## Claims

### Claim 1

A method of making a cold shield for an infrared detector array, wherein the array consists of a plurality of detectors and connecting leads on one side of a substrate, wherein the method includes the steps of:
(a) coating said detectors, said leads, and one side of said substrate with a thin subcoat;
(b) depositing a relatively thin metal layer on said subcoat;
(c) electroplating a relatively thick metal on said thin metal layer;
(d) masking said thick metal layer in accordance with said array and etching through said thick and thin metal layers to uncover the subcoat over the detectors and at least a portion of said leads; and
(e) removing the mask.

### Claim 2

A method of making a cold shield for an infrared detector array, wherein the array consists of a plurality of detectors and connecting leads on one side of a substrate, wherein the method includes the steps of:
(a) coating said detectors, said leads, and one side of said substrate with a thin subcoat;
(b) depositing a relatively thin metal layer on said subcoat;
(c) masking said thin metal layer in accordance with said array and etching through said thin metal layer to uncover the sublayer over the detectors and at least a portion of said leads;
(d) removing the mask; and
(e) electroplating a relatively thick metal layer on said thin metal layer.

### Claim 3 (depends on 1, 2)

The method as set forth in either claim 1 or claim 2 wherein said subcoat is a photoresist layer.

### Claim 4 (depends on 1, 2)

The method as set forth in either claim 1 or claim 2 wherein the uncovered portions of said subcoat are removed.