# US 4,391,651 A · Method of forming a hyperabrupt interface in a GaAs substrate

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- Number: US 4,391,651 A
- Document ID: US4391651A
- Status: Granted
- Kind: A
- Application number: 06/311,709
- Filed: 1981-10-15
- Granted: 1983-07-05
- Earliest claimed: 1981-10-15
- Assignees: The United States of America as represented by the Secretary of the Navy
- Inventors: Max N. Yoder
- Web page: https://patentgrep.com/patent/US4391651A

## CPC

- H10P 30/206: {into Group III-V semiconductors}
- H10D 62/357: {of FETs}
- H10P 30/208: {of electrically inactive species}
- H10P 30/21: {of electrically active species}
- H10P 30/218: {characterised by the implantation in a compound semiconductor of both electrically active and inactive species in the same semiconductor region to be doped n-type or p-type}
- H10P 30/28: characterised by an annealing step, e.g. for activation of dopants
- Y10S 148/084: Ion implantation of compound devices
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A method of fabricating improved semiconductor devices, such as FET's, wh require or are improved by a hyperabrupt interface between the active channel and the underlying insulating region. A substrate, such as GaAs, is polished and then implanted with light ions, such as protons, to amorphize the crystal structure down to a certain depth determined by the ion-beam accelerating voltage and the ion fluence level. The crystal is damaged but not amorphized below the lowest amorphization depth. The interface between the amorphized and the non-amorphized, but damaged, regions is a relatively narrow region which will become a hyperabrupt junction. The substrate is then implanted with donor ions, such as Si, in accordance with the requirements of the device to be fabricated and under conditions which provide a retrograde donor ion concentration profile with depth. An annealing/donor activating step is now performed at a relatively low temperature (600.degree. C. or less) to avoid breaking down the hyperabrupt interface.

## Claims

### Claim 1

An improved method of forming, in the fabrication of a desired FET, a hyperabrupt interface in a GaAs substrate, wherein said improved method comprises the steps of:
preamorphizing a region of said GaAs substrate to a predetermined depth;
implanting donor ions in said preamorphized region to a depth of 90% of the predetermined depth thereby creating a retrograde donor ion concentration profile with depth; and
annealing said GaAs substrate to activate said implanted donor ions, thereby creating an electrically active region and an underlying amorphous region in said preamorphized region and forming said hyperabrupt interface therebetween.

### Claim 2 (depends on 1)

The improved method of claim 1 wherein said preamorphizing step comprises the steps of:
polishing said GaAs substrate;
implanting damage ions at a fluence and an energy level necessary to preamorphize said polished GaAs substrate to the predetermined depth, the predetermined depth being that which is required for the active channel of the desired FET; and
implanting fill damage ions at a lesser energy level to insure that the surface of said polished GaAs substrate is also preamorphized.

### Claim 3 (depends on 2)

The improved method of claim 2 wherein said damage ions are protons.

### Claim 4 (depends on 3)

The improved method of claim 3 wherein said damage ions are produced from one or more elements selected from the group consisting of helium, hydrogen, and the noble gases.

### Claim 5 (depends on 4)

The improved method of claim 4 wherein said donor ions are produced from one or more elements selected from the group consisting of Si and Se.

### Claim 6 (depends on 5)

The improved method of claim 5 wherein said annealing step is performed at a temperature of 600.degree. C. or less to restore crystallinity in the electrically active region, but yet avoid breaking down said hyperabrupt interface.